Optical Imems ® – a Fabrication Process for Mems Optical Switches with Integrated On-chip Electronics
نویسندگان
چکیده
The ability of silicon micromachining to produce small, precision, movable parts provides an opportunity for MEMS component use in optical communications networks [1,2]. To address this potential market, Analog Devices has developed the Optical iMEMS process for fabricating MEMS optical components with integrated, onchip electronics. While this process could be used to make a variety of optics components including mirrors, shutters and actuators for precision alignment, we report here on a MEMS mirror for optical switching. The device consists of a double-gimbaled mirror with on-chip high voltage drive electronics and low-voltage CMOS for capacitive position sense. The mirror can tilt about both the Xand Y-axis, with position sense in both directions of tilt.
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